• Cluster-typed Tandem Evaporation System

[Specification]
• R&D of Large-area Perovskite Solar Cells
• Deposition Chamber for CTL (Charge Transport Layer)
• Deposition Chamber for ALD (Atomic Layer Deposition)
• Deposition Chamber for TCO (Transparent Conductive Oxide)
• Automation (Transfer Robot )
• Glovebox Integration for wet process (Sample size: M6) - Slot Die Coater and Spin Coater
• Proven Records for Thickness Uniformity and Repeatability